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Semiconductor & Display Dielectric Materials: Positive & Negative
Semiconductor & Display Dielectric Materials: Positive & Negative
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- 실리콘 나노 기술을 이용한 고감도/저유전 Dielectric 개발
- PHS기술을 이용한 고감도/고해상도 Photo-resist개발
| Type | Key Features |
| Positive | High heat resistance and high resolution through Si polymers and KrF technology |
| Negative | Free from bias and stitch defects through composition technology. |
